7/5/2010	12:09:37 AM	Helium valve closed
7/5/2010	12:09:37 AM	PH3 valve closed
7/5/2010	12:09:37 AM	Main Vac valve closed
7/5/2010	12:09:38 AM	Bypass valve closed
7/5/2010	12:09:38 AM	H2 valve opened
7/5/2010	12:09:38 AM	BCl3 valve opened
7/5/2010	12:09:38 AM	SiCl4 pre valve opened
7/5/2010	12:09:38 AM	SiCl4 post valve opened
7/5/2010	12:09:38 AM	Bubbler valve opened
7/5/2010	12:09:38 AM	Helium MFC set to  0.000000
7/5/2010	12:09:38 AM	H2 MFC set to  500.000000
7/5/2010	12:09:38 AM	BCl3 MFC set to  12.000000
7/5/2010	12:09:38 AM	PHl3 MFC set to  0.000000
7/5/2010	12:09:38 AM	SiCl4 MFC set to  50.000000
7/5/2010	12:09:38 AM	Bypass solenoid MFC set to  0.000000
7/5/2010	12:09:38 AM	Tube furnace set to 1000
7/5/2010	12:29:38 AM	H2 valve closed
7/5/2010	12:29:38 AM	BCl3 valve closed
7/5/2010	12:29:38 AM	PH3 valve closed
7/5/2010	12:29:38 AM	SiCl4 pre valve closed
7/5/2010	12:29:38 AM	SiCl4 post valve closed
7/5/2010	12:29:38 AM	Main Vac valve closed
7/5/2010	12:29:38 AM	Bypass valve closed
7/5/2010	12:29:38 AM	Helium valve opened
7/5/2010	12:29:38 AM	Bubbler valve opened
7/5/2010	12:29:38 AM	Helium MFC set to  500.000000
7/5/2010	12:29:38 AM	H2 MFC set to  0.000000
7/5/2010	12:29:38 AM	BCl3 MFC set to  0.000000
7/5/2010	12:29:38 AM	PHl3 MFC set to  0.000000
7/5/2010	12:29:38 AM	SiCl4 MFC set to  0.000000
7/5/2010	12:29:38 AM	Bypass solenoid MFC set to  0.000000
7/5/2010	12:29:38 AM	Tube furnace set to 0
7/5/2010	12:49:38 AM	Helium valve closed
7/5/2010	12:49:38 AM	H2 valve closed
7/5/2010	12:49:38 AM	BCl3 valve closed
7/5/2010	12:49:38 AM	PH3 valve closed
7/5/2010	12:49:38 AM	SiCl4 pre valve closed
7/5/2010	12:49:38 AM	SiCl4 post valve closed
7/5/2010	12:49:38 AM	Main Vac valve closed
7/5/2010	12:49:38 AM	Bypass valve closed
7/5/2010	12:49:38 AM	Bubbler valve closed
7/5/2010	12:49:38 AM	Helium MFC set to  0.000000
7/5/2010	12:49:38 AM	H2 MFC set to  0.000000
7/5/2010	12:49:38 AM	BCl3 MFC set to  0.000000
7/5/2010	12:49:38 AM	PHl3 MFC set to  0.000000
7/5/2010	12:49:38 AM	SiCl4 MFC set to  0.000000
7/5/2010	12:49:38 AM	Bypass solenoid MFC set to  0.000000
7/5/2010	12:49:38 AM	Tube furnace set to 0
7/5/2010	12:49:38 AM	Run finished at 12:49 AM
7/5/2010	1:04:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2010	1:04:37 AM	Recipe started at 1:04 AM
7/5/2010	1:04:37 AM	Helium valve closed
7/5/2010	1:04:37 AM	H2 valve closed
7/5/2010	1:04:37 AM	BCl3 valve closed
7/5/2010	1:04:37 AM	PH3 valve closed
7/5/2010	1:04:37 AM	SiCl4 pre valve closed
7/5/2010	1:04:37 AM	SiCl4 post valve closed
7/5/2010	1:04:37 AM	Main Vac valve closed
7/5/2010	1:04:37 AM	Bubbler valve closed
7/5/2010	1:04:37 AM	Bypass valve opened
7/5/2010	1:04:37 AM	Helium MFC set to  0.000000
7/5/2010	1:04:37 AM	H2 MFC set to  0.000000
7/5/2010	1:04:37 AM	BCl3 MFC set to  0.000000
7/5/2010	1:04:37 AM	PHl3 MFC set to  0.000000
7/5/2010	1:04:37 AM	SiCl4 MFC set to  0.000000
7/5/2010	1:04:37 AM	Bypass solenoid MFC set to  0.000000
7/5/2010	1:04:37 AM	Tube furnace set to 0
7/5/2010	1:05:26 AM	Helium valve closed
7/5/2010	1:05:26 AM	H2 valve closed
7/5/2010	1:05:26 AM	BCl3 valve closed
7/5/2010	1:05:26 AM	PH3 valve closed
7/5/2010	1:05:26 AM	SiCl4 pre valve closed
7/5/2010	1:05:26 AM	SiCl4 post valve closed
7/5/2010	1:05:26 AM	Bubbler valve closed
7/5/2010	1:05:26 AM	Main Vac valve opened
7/5/2010	1:05:26 AM	Bypass valve opened
7/5/2010	1:05:26 AM	Helium MFC set to  0.000000
7/5/2010	1:05:26 AM	H2 MFC set to  0.000000
7/5/2010	1:05:26 AM	BCl3 MFC set to  0.000000
7/5/2010	1:05:26 AM	PHl3 MFC set to  0.000000
7/5/2010	1:05:26 AM	SiCl4 MFC set to  0.000000
7/5/2010	1:05:26 AM	Bypass solenoid MFC set to  0.000000
7/5/2010	1:05:27 AM	Tube furnace set to 0
7/5/2010	1:05:27 AM	Run finished at 1:05 AM
7/5/2010	1:05:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
